Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8368902 | Lithographic apparatus and method for calibrating the same | Erik Roelof Loopstra, Leon Martin Levasier | 2013-02-05 |
| 7880901 | Lithographic apparatus and method for calibrating the same | Erik Roelof Loopstra, Leon Martin Levasier | 2011-02-01 |
| 7859686 | Lithographic apparatus and method for calibrating the same | Erik Roelof Loopstra, Leon Martin Levasier | 2010-12-28 |
| 7528965 | Lithographic apparatus and method for calibrating the same | Erik Roelof Loopstra, Leon Martin Levasier | 2009-05-05 |
| 7502096 | Lithographic apparatus, calibration method, device manufacturing method and computer program product | Jeffrey Godefridus Cornelis Tempelaars, Gerardus Carolus Johannus Hofmans, Jan-Peter Hauschild, Hans Erik KATTOUW | 2009-03-10 |
| 7408655 | Lithographic apparatus and method for calibrating the same | Erik Roelof Loopstra, Leon Martin Levasier | 2008-08-05 |
| 7374957 | Method of calibrating or qualifying a lithographic apparatus or part thereof, and device manufacturing method | — | 2008-05-20 |
| 7292312 | Lithographic apparatus and method for calibrating the same | Erik Roelof Loopstra, Leon Martin Levasier | 2007-11-06 |
| 7256871 | Lithographic apparatus and method for calibrating the same | Erik Roelof Loopstra, Leon Martin Levasier | 2007-08-14 |
| 7239368 | Using unflatness information of the substrate table or mask table for decreasing overlay | Ralph Brinkhof, Tjarko Adriaan Rudolf Van Empel, Leon Martin Levasier, Joost Jeroen Ottens, Koen Jacobus Johannes Maria Zaal +1 more | 2007-07-03 |