Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8908148 | Calibration method and inspection apparatus | Hubertus Antonius Geraets, Sven Gunnar Krister Magnusson | 2014-12-09 |
| 8554510 | Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program product | Frank Staals, Hans Van Der Laan, Hans Butler, Sven Gunnar Krister Magnusson | 2013-10-08 |
| 8446564 | Lithographic apparatus and device manufacturing method | Bart Peter Bert Segers, Daan Maurtis Slotboom | 2013-05-21 |
| 8436998 | Method of measuring focus of a lithographic projection apparatus | Hubertus Antonius Geraets, Mark Zellenrath, Sven Gunnar Krister Magnusson | 2013-05-07 |
| 8289516 | Method of measuring focus of a lithographic projection apparatus | Hubertus Antonius Geraets, Mark Zellenrath, Sven Gunnar Krister Magnusson | 2012-10-16 |
| 8208122 | Method of measuring a lithographic projection apparatus | Frank Staals, Hans Van Der Laan, Sven Gunnar Krister Magnusson | 2012-06-26 |
| 7502096 | Lithographic apparatus, calibration method, device manufacturing method and computer program product | Jeffrey Godefridus Cornelis Tempelaars, Rene Oesterholt, Jan-Peter Hauschild, Hans Erik KATTOUW | 2009-03-10 |
| 7379154 | Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle | Richard Joseph Bruls, Orlando Serapio Cicilia, Hendrikus Alphonsus Ludovicus Van Dijck, Tammo Uitterdijk | 2008-05-27 |