Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8908148 | Calibration method and inspection apparatus | Hubertus Antonius Geraets, Gerardus Carolus Johannus Hofmans | 2014-12-09 |
| 8554510 | Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program product | Frank Staals, Hans Van Der Laan, Hans Butler, Gerardus Carolus Johannus Hofmans | 2013-10-08 |
| 8436998 | Method of measuring focus of a lithographic projection apparatus | Gerardus Carolus Johannus Hofmans, Hubertus Antonius Geraets, Mark Zellenrath | 2013-05-07 |
| 8289516 | Method of measuring focus of a lithographic projection apparatus | Gerardus Carolus Johannus Hofmans, Hubertus Antonius Geraets, Mark Zellenrath | 2012-10-16 |
| 8208122 | Method of measuring a lithographic projection apparatus | Frank Staals, Gerardus Carolus Johannus Hofmans, Hans Van Der Laan | 2012-06-26 |
| 8174678 | Lithographic apparatus with adjusted exposure slit shape enabling reduction of focus errors due to substrate topology and device manufacturing method | Martin Jules Marie-Emile De Nivelle, Frank Staals, Wim Tjibbo Tel | 2012-05-08 |