Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339594 | Substrate level sensing in a lithographic apparatus | Jori Selen, Marcel Bontekoe, Doru Cristian Torumba | 2025-06-24 |
| 11662669 | Apparatus and method for measuring substrate height | Andrey Valerievich ROGACHEVSKIY, Arjan Gijsbertsen, Willem Richard Pongers, Viktor TROGRLIC | 2023-05-30 |
| 11029614 | Level sensor apparatus, method of measuring topographical variation across a substrate, method of measuring variation of a physical parameter related to a lithographic process, and lithographic apparatus | Wim Tjibbo Tel, Frank Staals, Tanbir HASAN | 2021-06-08 |
| 8411254 | Device manufacturing method, control system, computer program and computer-readable medium | — | 2013-04-02 |
| 8174678 | Lithographic apparatus with adjusted exposure slit shape enabling reduction of focus errors due to substrate topology and device manufacturing method | Sven Gunnar Krister Magnusson, Frank Staals, Wim Tjibbo Tel | 2012-05-08 |
| 7649635 | Method for determining a map, device manufacturing method, and lithographic apparatus | Hielke Schoonewelle, Marcus Boonman, Ralph Brinkhof, Jan Stoeten, Erwin Antonius Martinus Van Alphen | 2010-01-19 |
| 7292351 | Method for determining a map, device manufacturing method, and lithographic apparatus | Hielke Schoonewelle, Marcus Boonman, Ralph Brinkhof, Jan Stoeten, Erwin Antonius Martinus Van Alphen | 2007-11-06 |
| 7113257 | Assembly comprising a sensor for determining at least one of tilt and height of a substrate, a method therefor and a lithographic projection apparatus | Ralph Brinkhof, Marcus Boonman | 2006-09-26 |