Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405542 | Method of determining a mark measurement sequence, stage apparatus and lithographic apparatus | Istvan Nagy, Özer Duman, Pieter Jacob Heres, Rudolf Michiel Hermans, Erik W. L. Jansen +3 more | 2025-09-02 |
| 12399436 | Substrate holder, carrier system comprising a substrate holder and lithographic apparatus | Krijn Frederik Bustraan, Paul Van Dongen, Ibrahim Acan | 2025-08-26 |
| 12253807 | Height measurement method and height measurement system | Andrey Valerievich ROGACHEVSKIY, Bastiaan Andreas Wilhelmus Hubertus Knarren, Doru Cristian Torumba, Cristina CARESIO, Raymund CENTENO +2 more | 2025-03-18 |
| 11662669 | Apparatus and method for measuring substrate height | Andrey Valerievich ROGACHEVSKIY, Martin Jules Marie-Emile De Nivelle, Willem Richard Pongers, Viktor TROGRLIC | 2023-05-30 |
| 9519224 | Lithographic apparatus and method | Hubertus Antonius Geraets, Bart Peter Bert Segers, Natalia Viktorovna Davydova | 2016-12-13 |