Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798225 | Method of characterizing, method of forming a model, method of simulating, mask manufacturing method and device manufacturing method | Eelco Van Setten, Eleni Psara, Anton Bernhard Van Oosten | 2017-10-24 |
| 9519224 | Lithographic apparatus and method | Arjan Gijsbertsen, Hubertus Antonius Geraets, Bart Peter Bert Segers | 2016-12-13 |