Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112260 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Lorenzo Tripodi, Patrick Warnaar, Grzegorz Grzela, Mohammadreza Hajiahmadi, Farzad Farhadzadeh +5 more | 2024-10-08 |
| 11822255 | Process window based on defect probability | Abraham SLACHTER, Stefan Hunsche, Wim Tjibbo Tel, Koenraad VAN INGEN SCHENAU, Gijsbert Rispens +1 more | 2023-11-21 |
| 11460782 | Matching pupil determination | — | 2022-10-04 |
| 11314174 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Laurentius Cornelius De Winter, Roland Pieter Stolk, Frank Staals, Paul Christiaan Hinnen, Marinus Jochemsen +2 more | 2022-04-26 |
| 11287748 | Guided patterning device inspection | Vidya Vaenkatesan, James Wiley, Reinder Teun Plug | 2022-03-29 |
| 11150560 | Projection system and mirror and radiation source for a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst, Koen Jacobus Johannes Maria Zaal | 2021-10-19 |
| 11079687 | Process window based on defect probability | Abraham SLACHTER, Stefan Hunsche, Wim Tjibbo Tel, Koenraad VAN INGEN SCHENAU, Gijsbert Rispens +1 more | 2021-08-03 |
| 11054754 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Frank Staals, Yasri Yudhistira, Carlo Cornelis Maria Luijten, Bert Verstraeten, Jan-Willem Gemmink | 2021-07-06 |
| 10775705 | Patterning stack optimization | Wim Tjibbo Tel, Jozef Maria Finders, Orion Jonathan Pierre Mouraille | 2020-09-15 |
| 10732511 | Projection system and mirror and radiation source for a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst, Koen Jacobus Johannes Maria Zaal | 2020-08-04 |
| 10571812 | Method of calibrating focus measurements, measurement method and metrology apparatus, lithographic system and device manufacturing method | Fahong Li, Miguel GARCIA GRANDA, Carlo Cornelis Maria Luijten, Bart Peter Bert Segers, Cornelis Andreas Franciscus Johannes Van Der Poel +2 more | 2020-02-25 |
| 10216093 | Projection system and minor and radiation source for a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst, Koen Jacobus Johannes Maria Zaal | 2019-02-26 |
| 10054862 | Inspection apparatus, inspection method, lithographic apparatus, patterning device and manufacturing method | Paul Christiaan Hinnen, Robertus Cornelis Martinus De Kruif, Robert John Socha | 2018-08-21 |
| 10001710 | Inspection apparatus, inspection method, lithographic apparatus and manufacturing method | Frank Staals, Carlo Cornelis Maria Luijten, Paul Christiaan Hinnen | 2018-06-19 |
| 9798225 | Method of characterizing, method of forming a model, method of simulating, mask manufacturing method and device manufacturing method | Eelco Van Setten, Natalia Viktorovna Davydova, Eleni Psara | 2017-10-24 |