Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10571812 | Method of calibrating focus measurements, measurement method and metrology apparatus, lithographic system and device manufacturing method | Fahong Li, Miguel GARCIA GRANDA, Carlo Cornelis Maria Luijten, Bart Peter Bert Segers, Frank Staals +2 more | 2020-02-25 |