Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346031 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Fei Liu, Jin LIAN, Zhuangxiong HUANG, Frank Staals | 2025-07-01 |
| 12271008 | Transmissive diffusor | Andrey Nikipelov, Marcus Adrianus Van De Kerkhof, Pieter-Jan Van Zwol, Wouter Joep ENGELEN, Alexey Olegovich POLYAKOV | 2025-04-08 |
| 11314174 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Roland Pieter Stolk, Frank Staals, Anton Bernhard Van Oosten, Paul Christiaan Hinnen, Marinus Jochemsen +2 more | 2022-04-26 |
| 10928735 | Patterning device | Marcus Adrianus Van De Kerkhof, Eelco Van Setten | 2021-02-23 |
| 10732498 | Patterning device | Pieter Cristiaan DE GROOT, Gerard Frans Jozef Schasfoort, Maksym SLADKOV, Manfred Petrus Johannes Maria DIKKERS, Jozef Maria Finders +6 more | 2020-08-04 |
| 10401723 | Patterning device | Pieter Cristiaan DE GROOT, Gerard Frans Jozef Schasfoort, Maksym SLADKOV, Manfred Petrus Johannes Maria DIKKERS, Jozef Maria Finders +6 more | 2019-09-03 |
| 10331042 | Method for a lithographic apparatus | Jozef Maria Finders | 2019-06-25 |
| 10139725 | Lithographic apparatus | James Wiley, Juan Diego Arias Espinoza, Derk Servatius Gertruda Brouns, Florian Didier Albin Dhalluin, Pedro Julian Rizo Diago +1 more | 2018-11-27 |
| 9690210 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker | 2017-06-27 |
| 9535341 | Method for a lithographic apparatus | Jozef Maria Finders | 2017-01-03 |
| 9280064 | Lithographic method and apparatus | Peter David Engblom, Carsten Kohler, Frank Staals | 2016-03-08 |
| 8780325 | Method for a lithographic apparatus | Luis Alberto Colina Santamaria, Jozef Maria Finders | 2014-07-15 |
| 8717540 | Calculating a laser metric within a lithographic apparatus and method thereof | Carsten Kohler, Hans Van Der Laan, Frank Staals, Herman Philip Godfried | 2014-05-06 |
| 8426088 | Method for a lithographic apparatus | Jozef Maria Finders | 2013-04-23 |
| 8300212 | Device manufacturing method and lithographic apparatus | Jozef Maria Finders | 2012-10-30 |
| 8237913 | Lithographic apparatus and method | Robert Kazinczi, Wim Tjibbo Tel | 2012-08-07 |
| 8178263 | Method for a lithographic apparatus | Jozef Maria Finders | 2012-05-15 |
| 8134683 | Device manufacturing method, computer program and lithographic apparatus | Hans Van Der Laan | 2012-03-13 |
| 7456931 | Device manufacturing method, computer program product and lithographic apparatus | Jozef Maria Finders, Maria Johanna Agnes Rubingh | 2008-11-25 |
| 7352443 | Radially polarized light in lithographic apparatus | Michel Fransois Hubert Klaassen | 2008-04-01 |
| 7307690 | Device manufacturing method, computer program product and lithographic apparatus | Jozef Maria Finders, Maria Johanna Agnes Rubingh | 2007-12-11 |
| 6598442 | Production of a component for reducing the effects of an external mechanical impact, and the component produced in this way | Peter Theodoor Vreede | 2003-07-29 |