Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9696635 | Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process | Adrianus Fransiscus Petrus Engelen, Henricus Johannes Lambertus Megens, Johannes Catharinus Hubertus Mulkens, Jen-Shiang Wang | 2017-07-04 |
| 8576377 | Lithographic apparatus and device manufacturing method | Steven George Hansen, Heine Melle Mulder | 2013-11-05 |
| 8237913 | Lithographic apparatus and method | Wim Tjibbo Tel, Laurentius Cornelius De Winter | 2012-08-07 |
| 7965547 | Arrangement and method for controlling a micromechanical element | — | 2011-06-21 |
| 7613039 | Arrangement and method for controlling a micromechanical element | — | 2009-11-03 |