Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11314174 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Laurentius Cornelius De Winter, Frank Staals, Anton Bernhard Van Oosten, Paul Christiaan Hinnen, Marinus Jochemsen +2 more | 2022-04-26 |
| 9645510 | Method of controlling a radiation source and lithographic apparatus comprising the radiation source | Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Adrianus Leonardus Gertrudus Bommer, Robert De Jong, Frank Everts, Herman Philip Godfried +1 more | 2017-05-09 |
| 8982319 | Lithographic apparatus and method | Paul Van Der Veen | 2015-03-17 |
| 7433139 | Variable attenuator for a lithographic apparatus | — | 2008-10-07 |
| 7283208 | Lithographic apparatus, method of manufacturing a device, and device manufactured thereby | Johannes Catharinus Hubertus Mulkens, Paul Van Der Veen, Roel De Jonge | 2007-10-16 |