Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8755027 | Lithographic apparatus and device manufacturing method involving fluid mixing and control of the physical property of a fluid | Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk +1 more | 2014-06-17 |
| 8027026 | Lithographic apparatus and device manufacturing method | Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk +1 more | 2011-09-27 |
| 7929116 | Polarized radiation in lithographic apparatus and device manufacturing method | Christian Wagner, Wilhelmus Petrus De Boeij, Tilmann Heil, Damian Fiolka | 2011-04-19 |
| 7894040 | Lithographic apparatus and device manufacturing method | Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk +1 more | 2011-02-22 |
| 7602475 | System and method for providing modified illumination intensity | — | 2009-10-13 |
| 7403267 | System and method for providing modified illumination intensity | — | 2008-07-22 |
| 7345740 | Polarized radiation in lithographic apparatus and device manufacturing method | Christian Wagner, Wilhelmus Petrus De Boeij, Tilmann Heil, Damian Fiolka | 2008-03-18 |
| 7283208 | Lithographic apparatus, method of manufacturing a device, and device manufactured thereby | Johannes Catharinus Hubertus Mulkens, Paul Van Der Veen, Roland Pieter Stolk | 2007-10-16 |
| 6423262 | Technique for measuring properties of polymeric fibres | Robert Jan Van Wijk, Anton Peter De Weijer, Dirk Albert Klarenberg, Gert Jan Jongerden | 2002-07-23 |