| 11774867 |
Radiation measurement system |
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT |
2023-10-03 |
| 11686951 |
Reducing speckle in an excimer light source |
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Thomas Patrick Duffey, Frank Everts, Joshua Jon Thornes, Brian Edward King |
2023-06-27 |
| 11569628 |
Pulse stretcher and method |
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT |
2023-01-31 |
| 11287743 |
Control system and method |
Frank Everts, Wilhelmus Patrick Elisabeth Maria OP 'T ROOT |
2022-03-29 |
| 11054665 |
Reducing speckle in an excimer light source |
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Thomas Patrick Duffey, Frank Everts, Joshua Jon Thornes, Brian Edward King |
2021-07-06 |
| 11050213 |
Online calibration for repetition rate dependent performance variables |
Joshua Jon Thornes, Tanuj Aggarwal, Kevin M. O'Brien, Frank Everts, Russell Allen Burdt |
2021-06-29 |
| 10851471 |
Optical quality diamond material |
Geoffrey Alan Scarsbrook, Daniel James Twitchen, Evert Pieter Houwman, Wilhelmus Gertruda Maria Nelissen, Andrew John Whitehead +2 more |
2020-12-01 |
| 10727642 |
Online calibration for repetition rate dependent performance variables |
Joshua Jon Thornes, Tanuj Aggarwal, Kevin M. O'Brien, Frank Everts, Russell Allen Burdt |
2020-07-28 |
| 10627724 |
Lithographic apparatus and method |
Frank Everts, Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Joshua Jon Thornes, Kevin M. O'Brien, Leon Pieter Paul Saanen +1 more |
2020-04-21 |
| 10451890 |
Reducing speckle in an excimer light source |
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Thomas Patrick Duffey, Frank Everts, Joshua Jon Thornes, Brian Edward King |
2019-10-22 |
| 10146133 |
Lithographic apparatus and method |
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Hubertus Petrus Leonardus Henrica VAN BUSSEL, Arij Jonathan Rijke, Marc Wilhelmus Maria Van Der Wijst, Mathijs Leonardus Johan Verhees |
2018-12-04 |
| 10146134 |
Illumination system |
Hubertus Petrus Leonardus Henrica VAN BUSSEL, Wilhelmus Patrick Elisabeth Maria OP 'T ROOT |
2018-12-04 |
| 10125434 |
Optical quality diamond material |
Geoffrey Alan Scarsbrook, Daniel James Twitchen, Evert Pieter Houwman, WILHEMUS GERTRUDA MARIA NELISSEN, Andrew John Whitehead +2 more |
2018-11-13 |
| 10082424 |
Diamond-based monitoring apparatus for lithographic apparatus, and a lithographic apparatus comprising diamond-based monitoring apparatus |
— |
2018-09-25 |
| 9933709 |
Lithographic apparatus and method |
Hubertus Petrus Leonardus Henrica VAN BUSSEL, Arij Jonathan Rijke, Wilhelmus Patrick Elisabeth Maria OP 'T ROOT |
2018-04-03 |
| 9762023 |
Online calibration for repetition rate dependent performance variables |
Joshua Jon Thornes, Tanuj Aggarwal, Kevin M. O'Brien, Frank Everts, Russell Allen Burdt |
2017-09-12 |
| 9645510 |
Method of controlling a radiation source and lithographic apparatus comprising the radiation source |
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Adrianus Leonardus Gertrudus Bommer, Robert De Jong, Frank Everts, Roland Pieter Stolk +1 more |
2017-05-09 |
| 9599510 |
Estimation of spectral feature of pulsed light beam |
Thomas Patrick Duffey |
2017-03-21 |
| 9551090 |
Optical quality diamond material |
Geoffrey Alan Scarsbrook, Daniel James Twitchen, Evert Pieter Houwman, Wilhelmus Gertruda Maria Nelissen, Andrew John Whitehead +2 more |
2017-01-24 |
| 8936774 |
Optical quality diamond material |
Geoffrey Alan Scarsbrook, Daniel James Twitchen, Evert Pieter Houwman, Wilhelmus Gertruda Maria Nelissen, Andrew John Whitehead +2 more |
2015-01-20 |
| 8717540 |
Calculating a laser metric within a lithographic apparatus and method thereof |
Carsten Kohler, Hans Van Der Laan, Frank Staals, Laurentius Cornelius De Winter |
2014-05-06 |
| 8508716 |
Homogenizer |
Bert Claessens, Marcel Mathijs Theodore Marie Dierichs |
2013-08-13 |
| 8432529 |
Lithographic apparatus and monitoring method |
Bert Claessens, Paul Van Der Veen |
2013-04-30 |
| 8309205 |
Single crystal diamond elements having convex surfaces and methods of its fabrication |
Wilhelmus Gerarda Maria Nelissen, Evert Pieter Houwman, Paulus Adrianus Cornelis Kriele, Johannes Lamers, Gerrit Jan Pels +5 more |
2012-11-13 |
| 7740824 |
Optical quality diamond material |
Geoffrey Alan Scarsbrook, Daniel James Twitchen, Evert Pieter Houwman, Wilhelmus Gertruda Maria Nelissen, Andrew John Whitehead +2 more |
2010-06-22 |