Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769982 | Lithography system bandwidth control | — | 2023-09-26 |
| 11050213 | Online calibration for repetition rate dependent performance variables | Joshua Jon Thornes, Kevin M. O'Brien, Frank Everts, Herman Philip Godfried, Russell Allen Burdt | 2021-06-29 |
| 10892594 | Gas optimization in a gas discharge light source | — | 2021-01-12 |
| 10833471 | Lithography system bandwidth control | — | 2020-11-10 |
| 10727642 | Online calibration for repetition rate dependent performance variables | Joshua Jon Thornes, Kevin M. O'Brien, Frank Everts, Herman Philip Godfried, Russell Allen Burdt | 2020-07-28 |
| 10627724 | Lithographic apparatus and method | Frank Everts, Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Herman Philip Godfried, Joshua Jon Thornes, Kevin M. O'Brien +1 more | 2020-04-21 |
| 10218147 | Gas optimization in a gas discharge light source | — | 2019-02-26 |
| 10096969 | Method for dither free adaptive and robust dose control for photolithography | — | 2018-10-09 |
| 10090629 | Gas mixture control in a gas discharge light source | Rahul Ahlawat | 2018-10-02 |
| 10036963 | Estimating a gain relationship of an optical source | — | 2018-07-31 |
| 9939732 | Controller for an optical system | — | 2018-04-10 |
| 9819136 | Gas mixture control in a gas discharge light source | Rahul Ahlawat | 2017-11-14 |
| 9762023 | Online calibration for repetition rate dependent performance variables | Joshua Jon Thornes, Kevin M. O'Brien, Frank Everts, Herman Philip Godfried, Russell Allen Burdt | 2017-09-12 |
| 9634455 | Gas optimization in a gas discharge light source | — | 2017-04-25 |