Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11803126 | Method of compensating wavelength error induced by repetition rate deviation | Kuo-Tai Teng | 2023-10-31 |
| 11754541 | Fluorine detection in a gas discharge light source | Joshua Jon Thornes, Edward Siqi Luo, Gamaralalage G. Padmabandu | 2023-09-12 |
| 10816905 | Wavelength stabilization for an optical source | — | 2020-10-27 |
| 10096967 | Wavelength control system for pulse-by-pulse wavelength target tracking in DUV light source | Thomas Patrick Duffey | 2018-10-09 |
| 10090629 | Gas mixture control in a gas discharge light source | Tanuj Aggarwal | 2018-10-02 |
| 9819136 | Gas mixture control in a gas discharge light source | Tanuj Aggarwal | 2017-11-14 |
| 9785050 | Pulsed light beam spectral feature control | Kevin M. O'Brien | 2017-10-10 |
| 9772556 | Pulsed light beam spectral feature control | Kevin M. O'Brien | 2017-09-26 |
| 9634460 | Compensation for a disturbance in an optical source | — | 2017-04-25 |
| 9261794 | Compensation for a disturbance in an optical source | — | 2016-02-16 |