Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341314 | Conduit system, radiation source, lithographic apparatus, and methods thereof | Thomas D. Steiger, Andrew Jay Effenberger, Jr., Mohammad Amin Khamehchi | 2025-06-24 |
| 11949202 | Gas management system | Yzzer Roman Gutierrez, Walter Dale Gillespie, Dinesh Kanawade | 2024-04-02 |
| 11949203 | Gas management system | Yzzer Roman Gutierrez, Walter Dale Gillespie, Dinesh Kanawade | 2024-04-02 |
| 11754541 | Fluorine detection in a gas discharge light source | Joshua Jon Thornes, Rahul Ahlawat, Gamaralalage G. Padmabandu | 2023-09-12 |
| 11349273 | Apparatus for tuning discharge performance in a laser chamber | Richard C. Ujazdowski, Shuang Xu | 2022-05-31 |