| 11774867 |
Radiation measurement system |
Herman Philip Godfried |
2023-10-03 |
| 11686951 |
Reducing speckle in an excimer light source |
Thomas Patrick Duffey, Herman Philip Godfried, Frank Everts, Joshua Jon Thornes, Brian Edward King |
2023-06-27 |
| 11569628 |
Pulse stretcher and method |
Herman Philip Godfried |
2023-01-31 |
| 11287743 |
Control system and method |
Herman Philip Godfried, Frank Everts |
2022-03-29 |
| 11054665 |
Reducing speckle in an excimer light source |
Thomas Patrick Duffey, Herman Philip Godfried, Frank Everts, Joshua Jon Thornes, Brian Edward King |
2021-07-06 |
| 10627724 |
Lithographic apparatus and method |
Frank Everts, Herman Philip Godfried, Joshua Jon Thornes, Kevin M. O'Brien, Leon Pieter Paul Saanen +1 more |
2020-04-21 |
| 10451890 |
Reducing speckle in an excimer light source |
Thomas Patrick Duffey, Herman Philip Godfried, Frank Everts, Joshua Jon Thornes, Brian Edward King |
2019-10-22 |
| 10146133 |
Lithographic apparatus and method |
Herman Philip Godfried, Hubertus Petrus Leonardus Henrica VAN BUSSEL, Arij Jonathan Rijke, Marc Wilhelmus Maria Van Der Wijst, Mathijs Leonardus Johan Verhees |
2018-12-04 |
| 10146134 |
Illumination system |
Herman Philip Godfried, Hubertus Petrus Leonardus Henrica VAN BUSSEL |
2018-12-04 |
| 10103508 |
Electron injector and free electron laser |
Andrey Nikipelov, Vadim Yevgenyevich Banine, Pieter Willem Herman De Jager, Gosse Charles De Vries, Olav Waldemar Vladimir Frijns +7 more |
2018-10-16 |
| 9933709 |
Lithographic apparatus and method |
Herman Philip Godfried, Hubertus Petrus Leonardus Henrica VAN BUSSEL, Arij Jonathan Rijke |
2018-04-03 |
| 9645510 |
Method of controlling a radiation source and lithographic apparatus comprising the radiation source |
Adrianus Leonardus Gertrudus Bommer, Robert De Jong, Frank Everts, Herman Philip Godfried, Roland Pieter Stolk +1 more |
2017-05-09 |