Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411425 | Fluid purging system | José Nilton Fonseca Junior, Franciscus Johannes Leonardus Heutz, Ferdy Migchelbrink, Henricus Anita Jozef Wilhelmus Van De Ven, Ramo Omerovic +1 more | 2025-09-09 |
| 12346031 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Fei Liu, Jin LIAN, Laurentius Cornelius De Winter, Frank Staals | 2025-07-01 |
| 12332570 | Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris | Ronald Peter Albright, Kursat Bal, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Sjoerd Frans DE VRIES +13 more | 2025-06-17 |
| 12292696 | Fluid purging system, projection system, illumination system, lithographic apparatus, and method | José Nilton Fonseca Junior, Franciscus Johannes Leonardus Heutz, Ferdy Migchelbrink | 2025-05-06 |
| 12158705 | End-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors and detection of membrane rupture in lithographic apparatuses | Joseph H. Lyons, Jimi Hendriks, Ping Zhou, Reinier Theodorus Martinus Jilisen | 2024-12-03 |
| 11703768 | Lithographic apparatus and related methods | Alisia Mariska Willems-Peters, Sander Baltussen, Reinier Theodorus Martinus Jilisen, Sietse Wijtvliet | 2023-07-18 |