Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332570 | Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris | Kursat Bal, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Sjoerd Frans DE VRIES, Olav Waldemar Vladimir Frijns +13 more | 2025-06-17 |
| 11550231 | Apparatus for and method of in-situ particle removal in a lithography apparatus | Jeffrey John Lombardo, Daniel Leslie Hall, Victor Antonio PEREZ-FALCON, Andrew Judge | 2023-01-10 |
| 11333984 | Apparatus for and method of in-situ particle removal in a lithography apparatus | Richard Joseph Bruls, Peter Kochersperger, Victor Antonio PEREZ-FALCON | 2022-05-17 |
| 11175596 | Particle traps and barriers for particle suppression | Han-Kwang Nienhuys, Jacob Brinkert, Yang-Shan Huang, Hendrikus Gijsbertus Schimmel, Antonie Hendrik Verweij | 2021-11-16 |
| 10585359 | Membrane assembly and particle trap | Lowell Lane Baker, Daniel Nathan Burbank | 2020-03-10 |
| 8259285 | Lithographic system, device manufacturing method, setpoint data optimization method, and apparatus for producing optimized setpoint data | Kars Zeger Troost, Jason Hintersteiner, Patricius Aloysius Jacobus Tinnemans, Wenceslao A. Cebuhar, Bernardo Kastrup | 2012-09-04 |
| 7018556 | Method to etch chrome deposited on calcium fluoride object | Nicholas A. DeLuca | 2006-03-28 |