Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11898601 | Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method | Siegfried Alexander Tromp, Abraham Alexander Soethoudt, Jan Pieter Van De Poel, Mark Constant Johannes Baggen | 2024-02-13 |
| 11442369 | Object stage bearing for lithographic apparatus | Yang-Shan Huang, Pieter Cornelis Johan De Jager, Rob Reilink, Christiaan Louis Valentin, Jasper Leonardus Johannes Scholten +1 more | 2022-09-13 |
| 11262663 | Tubular linear actuator, patterning device masking device and lithographic apparatus | Peter Michel Silvester Maria Heijmans, Olof Martinus Josephus Fischer, Maarten Hartger Kimman, Edwin Van Horne | 2022-03-01 |
| 11175596 | Particle traps and barriers for particle suppression | Han-Kwang Nienhuys, Ronald Peter Albright, Jacob Brinkert, Yang-Shan Huang, Hendrikus Gijsbertus Schimmel | 2021-11-16 |
| 11098759 | Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method | Siegfried Alexander Tromp, Abraham Alexander Soethoudt, Jan Pieter Van De Poel, Mark Constant Johannes Baggen | 2021-08-24 |
| 10656536 | Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method | Martinus Hendrikus Antonius Leenders, Niek Elout De Kruijf, Mircea Dusa, Martijn Houben, Johannes Gerardus Maria Mulder +5 more | 2020-05-19 |
| 10527092 | Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method | Siegfried Alexander Tromp, Abraham Alexander Soethoudt, Jan Pieter Van De Poel, Mark Constant Johannes Baggen | 2020-01-07 |
| 9188881 | Lithographic apparatus and method for reducing stray radiation | Marcel Mathijs Theodore Marie Dierichs, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek | 2015-11-17 |
| 7518705 | Lithographic apparatus and device manufacturing method | Edwin Johan Buis, Hans Butler | 2009-04-14 |