Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837931 | Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method | Maarten Hartger Kimman, Dave Braaksma, Christiaan Alexander Hoogendam | 2023-12-05 |
| 11303175 | Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method | Maarten Hartger Kimman, Dave Braaksma, Christiaan Alexander Hoogendam | 2022-04-12 |
| 11262663 | Tubular linear actuator, patterning device masking device and lithographic apparatus | Olof Martinus Josephus Fischer, Maarten Hartger Kimman, Edwin Van Horne, Antonie Hendrik Verweij | 2022-03-01 |
| 11112705 | Motor, dual stroke stage and lithographic apparatus | Joost Johan BOLDER, Jeroen Van Duivenbode, Ruud Hubertus Silvester Vrenken | 2021-09-07 |
| 10372045 | Method of calibrating a reluctance actuator assembly, reluctance actuator and lithographic apparatus comprising such reluctance actuator | Johannes Antonius Gerardus Akkermans, Bas Pieter Lemmen, Sjoerd Martijn Huiberts, Joeri Lof, Petrus Theodorus Rutgers +2 more | 2019-08-06 |
| 10191392 | Actuator, positioning device, lithographic apparatus, and method for manufacturing an actuator | Johannes Adrianus Antonius Theodorus Dams, Dirk Hendrikus Marinus ENGELEN, Simon Bernardus Cornelis Maria Martens, Hans Butler, Antonius Franciscus Johannes De Groot | 2019-01-29 |
| 10114300 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Mark Marcus Gerardus Heeren, Jacob Jan Velten, Johannes Hubertus Antonius Van De Rijdt, Godfried Katharina Hubertus Franciscus Geelen +1 more | 2018-10-30 |
| 9293951 | Lithographic apparatus and lorentz actuator | Fidelus Adrianus Boon, Hendrikus Pascal Gerardus Johannes Van Agtmaal, Abdelhamid Kechroud, Sven Antoin Johan Hol | 2016-03-22 |