Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10191392 | Actuator, positioning device, lithographic apparatus, and method for manufacturing an actuator | Johannes Adrianus Antonius Theodorus Dams, Dirk Hendrikus Marinus ENGELEN, Peter Michel Silvester Maria Heijmans, Hans Butler, Antonius Franciscus Johannes De Groot | 2019-01-29 |
| 8687171 | Electromagnetic actuator, stage apparatus and lithographic apparatus | Sven Antoin Johan Hol, Jan Van Eijk, Johannes Petrus Martinus Bernardus Vermeulen, Gerard Johannes Pieter Nijsse, Yang-Shan Huang +4 more | 2014-04-01 |