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Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly |
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| 11754918 |
Pellicle and pellicle assembly |
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Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly |
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Vibration isolation system and lithographic apparatus |
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Pellicle and pellicle assembly |
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Membrane for EUV lithography |
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Method for manufacturing a membrane assembly |
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Measurement substrate and a measurement method |
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Pellicle and pellicle assembly |
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Positioning device, lithographic apparatus and device manufacturing method |
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2019-06-04 |
