Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774868 | Image sensor for immersion lithography | Johan Franciscus Maria Beckers, Peter Brakhage, Arend Johannes Donkerbroek, Daniel N. Grimm, Tim Rathje +2 more | 2023-10-03 |
| 11762281 | Membrane for EUV lithography | Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Michiel Blauw, Derk Servatius Gertruda Brouns, Paul Janssen +17 more | 2023-09-19 |
| 11143969 | Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus | Giovanni Luca Gattobigio, Johan Franciscus Maria Beckers, Erik Henricus Egidius Catharina Eummelen, Ronald Frank KOX, Theodorus Wilhelmus Polet +4 more | 2021-10-12 |
| 10908496 | Membrane for EUV lithography | Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Michiel Blauw, Derk Servatius Gertruda Brouns, Paul Janssen +17 more | 2021-02-02 |