Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796921 | Method and lithograph apparatus for measuring a radiation beam | Yassin Chowdhury, Maurice Henricus Franciscus Janssen | 2023-10-24 |
| 11774868 | Image sensor for immersion lithography | Nirupam Banerjee, Johan Franciscus Maria Beckers, Peter Brakhage, Daniel N. Grimm, Tim Rathje +2 more | 2023-10-03 |
| 11137695 | Method of determining a height profile, a measurement system and a computer readable medium | Jeroen COTTAAR, Thomas Theeuwes, Erik Johan Koop | 2021-10-05 |
| 10845719 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Rene Marinus Gerardus Johan Queens, Wolfgang Henke, Jeroen COTTAAR | 2020-11-24 |
| 10503087 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Rene Marinus Gerardus Johan Queens, Pietro Andricciola, Ewoud Frank Van West | 2019-12-10 |