Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796921 | Method and lithograph apparatus for measuring a radiation beam | Arend Johannes Donkerbroek, Yassin Chowdhury | 2023-10-24 |
| 7443486 | Method for predicting a critical dimension of a feature imaged by a lithographic apparatus | Koen Van Ingen Schenau, Antoine Gaston Marie Kiers, Hans Van Der Laan, Peter Clement Paul Vanoppen | 2008-10-28 |
| 7199861 | Lithographic apparatus and device manufacturing method | Rene Hubert Jacobus Carpaij, Jan Bernard Plechelmus Van Schoot | 2007-04-03 |