Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315175 | Method in the manufacturing process of a device, a non-transitory computer-readable medium and a system configured to perform the method | Wim Tjibbo Tel, Vadim Yourievich TIMOSHKOV, Hermanus Adrianus DILLEN, Yichen Zhang, Te-Sheng WANG +1 more | 2025-05-27 |
| 11966168 | Method of measuring variation, inspection system, computer program, and computer system | Scott Anderson Middlebrooks, Jan-Willem Gemmink | 2024-04-23 |
| 11847570 | Deep learning for semantic segmentation of pattern | Adrianus Cornelis Matheus Koopman, Scott Anderson Middlebrooks, Mark John Maslow | 2023-12-19 |
| 11525786 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Paul Frank Luehrmann +4 more | 2022-12-13 |
| 11379970 | Deep learning for semantic segmentation of pattern | Adrianus Cornelis Matheus Koopman, Scott Anderson Middlebrooks, Mark John Maslow | 2022-07-05 |
| 11131936 | Method of measuring variation, inspection system, computer program, and computer system | Scott Anderson Middlebrooks, Jan-Willem Gemmink | 2021-09-28 |
| 10955353 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Paul Frank Luehrmann +4 more | 2021-03-23 |
| 10241055 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Paul Frank Luehrmann +4 more | 2019-03-26 |
| 9454084 | Method to determine the usefulness of alignment marks to correct overlay, and a combination of a lithographic apparatus and an overlay measurement system | Irina Lyulina, Franciscus Godefridus Casper Bijnen, Remi Daniel Marie Edart, Michael Kubis | 2016-09-27 |
| 9360770 | Method of determining focus corrections, lithographic processing cell and device manufacturing method | Arend Johannes Kisteman, Wim Tjibbo Tel, Thomas Theeuwes | 2016-06-07 |
| 9360769 | Method of determining focus corrections, lithographic processing cell and device manufacturing method | Arend Johannes Kisteman, Wim Tjibbo Tel, Thomas Theeuwes | 2016-06-07 |
| 9128065 | Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method | Hugo Augustinus Joseph Cramer, Henricus Petrus Maria Pellemans | 2015-09-08 |
| 8773657 | Method to determine the value of process parameters based on scatterometry data | Hans Van Der Laan, Rene Hubert Jacobus Carpaij, Hugo Augustinus Joseph Cramer | 2014-07-08 |
| 8760662 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Paul Frank Luehrmann +4 more | 2014-06-24 |
| 8724087 | Inspection apparatus for lithography | Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar, Leonardus Henricus Marie Verstappen, Scott Anderson Middlebrooks, Andreas Fuchs | 2014-05-13 |
| 8705007 | Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method | Hugo Augustinus Joseph Cramer, Henricus Petrus Maria Pellemans | 2014-04-22 |
| 8685626 | Method of measuring a characteristic | Johannes Anna Quaedackers, Paul Christiaan Hinnen, Christian Marinus Leewis | 2014-04-01 |
| 8553230 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Paul Frank Luehrmann +4 more | 2013-10-08 |
| 8294907 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Hugo Augustinus Joseph Cramer | 2012-10-23 |
| 8233155 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Theodorus Lambertus Marinus Der Kinderen, Vidya Vaenkatesan, Patrick Charles Maria Melis | 2012-07-31 |
| 8054467 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Paul Frank Luehrmann +4 more | 2011-11-08 |
| 7916927 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Hugo Augustinus Joseph Cramer, Durk Oeds Van Der Ploeg, Goce Naumoski, Roland Mark Van Weel | 2011-03-29 |
| 7911612 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef, Maurits Van Der Schaar | 2011-03-22 |
| 7791727 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Mircea Dusa, Maurits Van Der Schaar | 2010-09-07 |
| 7791732 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Paul Frank Luehrmann +4 more | 2010-09-07 |