Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8233155 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Antoine Gaston Marie Kiers, Vidya Vaenkatesan, Patrick Charles Maria Melis | 2012-07-31 |