Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11287748 | Guided patterning device inspection | Anton Bernhard Van Oosten, James Wiley, Reinder Teun Plug | 2022-03-29 |
| 8233155 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Antoine Gaston Marie Kiers, Theodorus Lambertus Marinus Der Kinderen, Patrick Charles Maria Melis | 2012-07-31 |