Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9454084 | Method to determine the usefulness of alignment marks to correct overlay, and a combination of a lithographic apparatus and an overlay measurement system | Irina Lyulina, Franciscus Godefridus Casper Bijnen, Antoine Gaston Marie Kiers, Michael Kubis | 2016-09-27 |
| 9291916 | Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods | Stefan Cornelis Theodorus Van Der Sanden, Richard Johannes Franciscus Van Haren, Hubertus Johannes Gertrudus Simons, Xiuhong Wei, Irina Lyulina +1 more | 2016-03-22 |
| 8982347 | Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus | Xiuhong Wei, Franciscus Godefridus Casper Bijnen, Richard Johannes Franciscus Van Haren, Marcus Adrianus Van De Kerkhof, Everhardus Cornelis Mos +4 more | 2015-03-17 |
| 8976355 | Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods | Stefan Cornelis Theodorus Van Der Sanden, Richard Johannes Franciscus Van Haren, Hubertus Johannes Gertrudus Simons, Xiuhong Wei, Michael Kubis +1 more | 2015-03-10 |
| 8576374 | Lithographic apparatus and method | Keith Frank Best, Henricus Wilhelmus Maria Van Buel, Cheng-Qun Gui, Johannes Onvlee, Rudy Jan Maria Pellens +2 more | 2013-11-05 |
| 7317509 | Method and system for automated process correction using model parameters, and lithographic apparatus using such method and system | — | 2008-01-08 |
| 7259828 | Alignment system and method and device manufactured thereby | Hoite Pieter Theodoor Tolsma, Ramon Navarro Y Koren, Hubertus Johannes Gertrudus Simons, Pui Leng LAM, Bernardus Johannes Antonius Hulshof +1 more | 2007-08-21 |
| 7126669 | Method and system for automated process correction using model parameters, and lithographic apparatus using such method and system | — | 2006-10-24 |