Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7332732 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more | 2008-02-19 |
| 7259828 | Alignment system and method and device manufactured thereby | Hoite Pieter Theodoor Tolsma, Hubertus Johannes Gertrudus Simons, Remi Daniel Marie Edart, Pui Leng LAM, Bernardus Johannes Antonius Hulshof +1 more | 2007-08-21 |
| 6844918 | Alignment system and methods for lithographic systems using at least two wavelengths | Hubertus Johannes Gertrudus Simons, Andre Bernardus Jeunink | 2005-01-18 |