Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE49460 | Inspection method and apparatus and lithographic processing cell | Everhardus Cornelis Mos, Peter Ten Berge, Nicole Schoumans, Michael Kubis, Paul Cornelis Hubertus Aben | 2023-03-14 |
| RE49199 | Inspection method and apparatus and lithographic processing cell | Everhardus Cornelis Mos, Peter Ten Berge, Nicole Schoumans, Michael Kubis, Paul Cornelis Hubertus Aben | 2022-09-06 |
| 11170072 | Method and apparatus for inspection and metrology | Everhardus Cornelis Mos, Velislava IGNATOVA, Erik Weber Jensen, Michael Kubis, Peter Ten Berge +2 more | 2021-11-09 |
| 11061336 | Device manufacturing method | Everhardus Cornelis Mos, Xiuhong Wei, Reza Mahmoodi Baram, Hadi YAGUBIZADE, Yichen Zhang | 2021-07-13 |
| 9927717 | Inspection method and apparatus, and lithographic apparatus | Kyu Kab Rhe, David Deckers, Thomas Theeuwes | 2018-03-27 |
| 9291916 | Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods | Stefan Cornelis Theodorus Van Der Sanden, Richard Johannes Franciscus Van Haren, Remi Daniel Marie Edart, Xiuhong Wei, Irina Lyulina +1 more | 2016-03-22 |
| 8982347 | Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus | Xiuhong Wei, Franciscus Godefridus Casper Bijnen, Richard Johannes Franciscus Van Haren, Marcus Adrianus Van De Kerkhof, Everhardus Cornelis Mos +4 more | 2015-03-17 |
| 8976355 | Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods | Stefan Cornelis Theodorus Van Der Sanden, Richard Johannes Franciscus Van Haren, Remi Daniel Marie Edart, Xiuhong Wei, Michael Kubis +1 more | 2015-03-10 |
| 8887107 | Inspection method and apparatus and lithographic processing cell | Everhardus Cornelis Mos, Peter Ten Berge, Nicole Schoumans, Michael Kubis, Paul Cornelis Hubertus Aben | 2014-11-11 |
| 8706442 | Alignment system, lithographic system and method | Everhardus Cornelis Mos, Henricus Johannes Lambertus Megens, Maurits Van Der Schaar, Scott Anderson Middlebrooks | 2014-04-22 |
| 8504333 | Method for selecting sample positions on a substrate, method for providing a representation of a model of properties of a substrate, method of providing a representation of the variation of properties of a substrate across the substrate and device manufacturing method | Everhardus Cornelis Mos, Scott Anderson Middlebrooks | 2013-08-06 |
| 8248579 | Lithographic apparatus, device manufacturing method and device for correcting overlay errors between overlapping patterns | Everhardus Cornelis Mos, Maurits Van Der Schaar | 2012-08-21 |
| 8237914 | Process, apparatus, and device for determining intra-field correction to correct overlay errors between overlapping patterns | Everhardus Cornelis Mos, Maurits Van Der Schaar | 2012-08-07 |
| 8139217 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more | 2012-03-20 |
| 7880880 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more | 2011-02-01 |
| 7683351 | Lithographic apparatus and device manufacturing method | Everhardus Cornelis Mos, Maurits Van Der Schaar | 2010-03-23 |
| 7573574 | Lithographic apparatus and device manufacturing method | Paul Christiaan Hinnen, Richard Johannes Franciscus Van Haren | 2009-08-11 |
| 7468795 | Method of selecting a grid model for correcting a process recipe for grid deformations in a lithographic apparatus and lithographic assembly using the same | Henricus Johannes Lambertus Megens, Everhardus Cornelis Mos, Leonardus Henricus Marie Verstappen, Roy Werkman, Henricus Jacobus Maria Verhoeven | 2008-12-23 |
| 7439531 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more | 2008-10-21 |
| 7332732 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more | 2008-02-19 |
| 7329888 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more | 2008-02-12 |
| 7297971 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen +9 more | 2007-11-20 |
| 7259828 | Alignment system and method and device manufactured thereby | Hoite Pieter Theodoor Tolsma, Ramon Navarro Y Koren, Remi Daniel Marie Edart, Pui Leng LAM, Bernardus Johannes Antonius Hulshof +1 more | 2007-08-21 |
| 6844918 | Alignment system and methods for lithographic systems using at least two wavelengths | Ramon Navarro Y Koren, Andre Bernardus Jeunink | 2005-01-18 |