Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE49460 | Inspection method and apparatus and lithographic processing cell | Everhardus Cornelis Mos, Hubertus Johannes Gertrudus Simons, Peter Ten Berge, Nicole Schoumans, Michael Kubis | 2023-03-14 |
| RE49199 | Inspection method and apparatus and lithographic processing cell | Everhardus Cornelis Mos, Hubertus Johannes Gertrudus Simons, Peter Ten Berge, Nicole Schoumans, Michael Kubis | 2022-09-06 |
| 11300891 | Methods and apparatus for calculating substrate model parameters and controlling lithographic processing | Jasper Menger, Everhardus Cornelis Mos | 2022-04-12 |
| 10859930 | Methods and apparatus for calculating substrate model parameters and controlling lithographic processing | Jasper Menger, Everhardus Cornelis Mos | 2020-12-08 |
| 10191390 | Method for transferring a mark pattern to a substrate, a calibration method, and a lithographic apparatus | Sanjaysingh Lalbahadoersing, Jurgen Johannes Henderikus Maria Schoonus, David Deckers | 2019-01-29 |
| 8887107 | Inspection method and apparatus and lithographic processing cell | Everhardus Cornelis Mos, Hubertus Johannes Gertrudus Simons, Peter Ten Berge, Nicole Schoumans, Michael Kubis | 2014-11-11 |