| 12366809 |
Methods and apparatus for controlling a lithographic process |
Roy Werkman, Bijoy Rajasekharan, Ignacio Salvador Vazquez Rodarte, Sarathi ROY |
2025-07-22 |
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| 12287584 |
Methods and apparatus for obtaining diagnostic information relating to an industrial process |
Alexander Ypma, Jasper Menger, David Han, Adrianus Cornelis Matheus Koopman, Irina Lyulina +3 more |
2025-04-29 |
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| 11940740 |
Methods and apparatus for obtaining diagnostic information relating to an industrial process |
Alexander Ypma, Jasper Menger, David Han, Adrianus Cornelis Matheus Koopman, Irina Lyulina +3 more |
2024-03-26 |
$63,385,000 |
| 11782349 |
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus |
Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more |
2023-10-10 |
$78,454,000 |
| 11754931 |
Method for determining corrections for lithographic apparatus |
Roy Werkman, Simon Philip Spencer Hastings, Jeffrey Thomas Ziebarth, Samee Ur Rehman, Davit Harutyunyan +2 more |
2023-09-12 |
$42,025,000 |
| 11592753 |
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus |
Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more |
2023-02-28 |
$85,887,000 |
| 11385550 |
Methods and apparatus for obtaining diagnostic information relating to an industrial process |
Alexander Ypma, Jasper Menger, David Han, Adrianus Cornelis Matheus Koopman, Irina Lyulina +3 more |
2022-07-12 |
$37,745,000 |
| 11327407 |
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus |
Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more |
2022-05-10 |
$53,738,000 |
| 11054813 |
Method and apparatus for controlling an industrial process using product grouping |
Alexander Ypma, Franciscus Godefridus Casper Bijnen, Richard Johannes Franciscus Van Haren, Weitian Kou |
2021-07-06 |
$78,090,000 |
| 10996573 |
Method and system for increasing accuracy of pattern positioning |
Peter Ten Berge, Peter Hanzen Wardenier |
2021-05-04 |
$52,009,000 |
| 10915689 |
Method and apparatus to correct for patterning process error |
Peter Ten Berge, Everhardus Cornelis Mos, Richard Johannes Franciscus Van Haren, Peter Hanzen Wardenier, Erik Weber Jensen +5 more |
2021-02-09 |
$92,634,000 |
| 10877381 |
Methods of determining corrections for a patterning process |
Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more |
2020-12-29 |
$55,676,000 |
| 10642162 |
Methods and apparatus for obtaining diagnostic information relating to an industrial process |
Alexander Ypma, Jasper Menger, David Han, Adrianus Cornelis Matheus Koopman, Irina Lyulina +3 more |
2020-05-05 |
$26,790,000 |
| 10274834 |
Methods and apparatus for obtaining diagnostic information relating to an industrial process |
Alexander Ypma, Jasper Menger, David Han, Adrianus Cornelis Matheus Koopman, Irina Lyulina +3 more |
2019-04-30 |
$18,691,000 |
| 10191390 |
Method for transferring a mark pattern to a substrate, a calibration method, and a lithographic apparatus |
Paul Cornelis Hubertus Aben, Sanjaysingh Lalbahadoersing, Jurgen Johannes Henderikus Maria Schoonus |
2019-01-29 |
$7,604,000 |
| 10151987 |
Measuring method, apparatus and substrate |
Franciscus Godefridus Casper Bijnen, Sami Musa |
2018-12-11 |
$14,000,000 |
| 9946165 |
Methods and apparatus for obtaining diagnostic information relating to an industrial process |
Alexander Ypma, Jasper Menger, David Han, Adrianus Cornelis Matheus Koopman, Irina Lyulina +3 more |
2018-04-17 |
$13,372,000 |
| 9927717 |
Inspection method and apparatus, and lithographic apparatus |
Kyu Kab Rhe, Hubertus Johannes Gertrudus Simons, Thomas Theeuwes |
2018-03-27 |
$7,635,000 |
| 9280057 |
Alignment measurement system, lithographic apparatus, and a method to determine alignment of in a lithographic apparatus |
Franciscus Godefridus Casper Bijnen, Sami Musa |
2016-03-08 |
$4,909,000 |
| 9046385 |
Alignment measurement system, lithographic apparatus, and a method to determine alignment in a lithographic apparatus |
Franciscus Godefridus Casper Bijnen, Sami Musa |
2015-06-02 |
$18,108,000 |
| 9025148 |
Alignment mark, substrate, set of patterning devices, and device manufacturing method |
Sam Musa |
2015-05-05 |
$17,453,000 |
| 8982347 |
Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus |
Xiuhong Wei, Franciscus Godefridus Casper Bijnen, Richard Johannes Franciscus Van Haren, Marcus Adrianus Van De Kerkhof, Everhardus Cornelis Mos +4 more |
2015-03-17 |
$3,746,000 |
