Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12366809 | Methods and apparatus for controlling a lithographic process | David Deckers, Bijoy Rajasekharan, Ignacio Salvador Vazquez Rodarte, Sarathi ROY | 2025-07-22 |
| 12276919 | Method for controlling a semiconductor manufacturing process | Marc Hauptmann, Cornelis Johannes Henricus LAMBREGTS, Amir Bin Ismail, Rizvi Rahman, Allwyn Boustheen +4 more | 2025-04-15 |
| 12124179 | Method of wafer alignment using at resolution metrology on product features | Wim Tjibbo Tel, Hermanus Adrianus DILLEN, Marc Jurian Kea, Weitian Kou | 2024-10-22 |
| 11994845 | Determining a correction to a process | Sarathi ROY, Edo Maria Hulsebos, Junru RUAN | 2024-05-28 |
| 11754931 | Method for determining corrections for lithographic apparatus | David Deckers, Simon Philip Spencer Hastings, Jeffrey Thomas Ziebarth, Samee Ur Rehman, Davit Harutyunyan +2 more | 2023-09-12 |
| 11669017 | Method for controlling a manufacturing apparatus and associated apparatuses | Bijoy Rajasekharan, Lydia Marianna Vergaij-Huizer, Jochem Sebastiaan Wildenberg, Ronald Van Ittersum, Pieter Gerardus Jacobus SMORENBERG +3 more | 2023-06-06 |
| 11442367 | Optimizing a sequence of processes for manufacturing of product units | Jochem Sebastiaan Wildenberg, Marinus Jochemsen, Erik Weber Jensen, Erik Johannes Maria Wallerbos, Cornelis Johannes Rijnierse +2 more | 2022-09-13 |
| 11435673 | Method of determining a set of metrology points on a substrate, associated apparatus and computer program | Kevin VAN DE RUIT, Jochem Sebastiaan Wildenberg | 2022-09-06 |
| 11378891 | Method for determining contribution to a fingerprint | Davit Harutyunyan, Fei Jia, Frank Staals, Fuming Wang, Hugo Thomas Looijestijn +8 more | 2022-07-05 |
| 11372338 | Method for evaluating control strategies in a semiconductor manufacturing process | Ivo Matteo Leonardus Weijden, Jeroen VAN DONGEN, Cornelis Johannes Henricus LAMBREGTS, Theo Wilhelmus Maria THIJSSEN, Ruud Rudolphus Johannes Catharinus De Wit +5 more | 2022-06-28 |
| 11327406 | Estimating a parameter of a substrate | Svetla Petrova Matova, Jochem Sebastiaan Wildenberg, Luc Roumen | 2022-05-10 |
| 11300887 | Method to change an etch parameter | Richard Johannes Franciscus Van Haren, Victor Emanuel Calado, Leon Paul VAN DIJK, Everhardus Cornelis Mos, Jochem Sebastiaan Wildenberg +4 more | 2022-04-12 |
| 11106141 | Optimizing a sequence of processes for manufacturing of product units | Jochem Sebastiaan Wildenberg, Marinus Jochemsen, Erik Weber Jensen, Erik Johannes Maria Wallerbos, Cornelis Johannes Rijnierse +2 more | 2021-08-31 |
| 11086305 | Determining a correction to a process | Sarathi ROY, Edo Maria Hulsebos, Junru RUAN | 2021-08-10 |
| 10928737 | Method for characterizing distortions in a lithographic process, lithographic apparatus, lithographic cell and computer program | Everhardus Cornelis Mos, Jochem Sebastiaan Wildenberg, Erik Johannes Maria Wallerbos | 2021-02-23 |
| 10884345 | Calibration method for a lithographic apparatus | Emil Peter Schmitt-Weaver, Jens Stäcker, Koenraad Remi André Maria Schreel | 2021-01-05 |
| 10816904 | Method for determining contribution to a fingerprint | Davit Harutyunyan, Fei Jia, Frank Staals, Fuming Wang, Hugo Thomas Looijestijn +8 more | 2020-10-27 |
| 10725372 | Method and apparatus for reticle optimization | Wim Tjibbo Tel, Marinus Jochemsen, Frank Staals, Christopher PRENTICE, Laurent Michel Marcel Depre +3 more | 2020-07-28 |
| 10627729 | Calibration method for a lithographic apparatus | Emil Peter Schmitt-Weaver, Jens Stäcker, Koenraad Remi André Maria Schreel | 2020-04-21 |
| 7969577 | Inspection apparatus, an apparatus for projecting an image and a method of measuring a property of a substrate | Everhardus Cornelis Mos, Maurits Van Der Schaar | 2011-06-28 |
| 7468795 | Method of selecting a grid model for correcting a process recipe for grid deformations in a lithographic apparatus and lithographic assembly using the same | Hubertus Johannes Gertrudus Simons, Henricus Johannes Lambertus Megens, Everhardus Cornelis Mos, Leonardus Henricus Marie Verstappen, Henricus Jacobus Maria Verhoeven | 2008-12-23 |
| 7433038 | Alignment of substrates for bonding | Franciscus Godefridus Casper Bijnen | 2008-10-07 |
| 7415319 | Lithographic apparatus and device manufacturing method | Everhardus Cornelis Mos | 2008-08-19 |
| 7042552 | Alignment strategy optimization method | Franciscus Bernardus Maria Van Bilsen, Bart Swinnen | 2006-05-09 |