Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11112700 | Optimization of a lithographic projection apparatus accounting for an interlayer characteristic | Wim Tjibbo Tel, Jorge Humberto Salvador Entradas | 2021-09-07 |
| 10725372 | Method and apparatus for reticle optimization | Wim Tjibbo Tel, Marinus Jochemsen, Frank Staals, Christopher PRENTICE, Johannes Marcus Maria Beltman +3 more | 2020-07-28 |
| 7681172 | Method and apparatus for modeling an apodization effect in an optical lithography system | Qiaolin Zhang, Paul VanAdrichem, Qiliang Yan | 2010-03-16 |