Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7681172 | Method and apparatus for modeling an apodization effect in an optical lithography system | Qiaolin Zhang, Laurent Michel Marcel Depre, Qiliang Yan | 2010-03-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7681172 | Method and apparatus for modeling an apodization effect in an optical lithography system | Qiaolin Zhang, Laurent Michel Marcel Depre, Qiliang Yan | 2010-03-16 |