Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287583 | Method for modeling measurement data over a substrate area and associated apparatuses | — | 2025-04-29 |
| 12032305 | Alignment method and associated alignment and lithographic apparatuses | Franciscus Godefridus Casper Bijnen | 2024-07-09 |
| 11994845 | Determining a correction to a process | Sarathi ROY, Roy Werkman, Junru RUAN | 2024-05-28 |
| 11966166 | Measurement apparatus and a method for determining a substrate grid | Franciscus Godefridus Casper Bijnen, Henricus Johannes Lambertus Megens, Robert John Socha, Youping Zhang | 2024-04-23 |
| 11927892 | Alignment method and associated alignment and lithographic apparatuses | Franciscus Godefridus Casper Bijnen | 2024-03-12 |
| 11181836 | Method for determining deformation | Patricius Aloysius Jacobus Tinnemans, Franciscus Godefridus Casper Bijnen | 2021-11-23 |
| 11086305 | Determining a correction to a process | Sarathi ROY, Roy Werkman, Junru RUAN | 2021-08-10 |
| 11079684 | Measurement apparatus and a method for determining a substrate grid | Franciscus Godefridus Casper Bijnen, Henricus Johannes Lambertus Megens, Robert John Socha, Youping Zhang | 2021-08-03 |
| 11029610 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Henricus Johannes Lambertus Megens, Ahmet Koray Erdamar, Loek Johannes Petrus Verhees, Willem Seine Christian Roelofs +11 more | 2021-06-08 |
| 10962887 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Boris Menchtchikov, Ahmet Koray Erdamar +13 more | 2021-03-30 |
| 10901326 | Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Patricius Aloysius Jacobus Tinnemans, Ralph Brinkhof, Pieter Jacob Heres, Jorn Kjeld Lucas, Loek Johannes Petrus Verhees +2 more | 2021-01-26 |
| 10620549 | Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Patricius Aloysius Jacobus Tinnemans, Ralph Brinkhof, Pieter Jacob Heres, Jorn Kjeld Lucas, Loek Johannes Petrus Verhees +2 more | 2020-04-14 |
| 10527958 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Boris Menchtchikov, Ahmet Koray Erdamar +13 more | 2020-01-07 |
| 10527957 | Method and apparatus for processing a substrate in a lithographic apparatus | Cayetano Sanchez-Fabres Cobaleda, Franciscus Godefridus Casper Bijnen, Arie Jeffrey Den Boef, Marcel Hendrikus Maria Beems, Piotr Michał Stolarz | 2020-01-07 |
| 10514620 | Alignment method | Franciscus Godefridus Casper Bijnen, Simon Gijsbert Josephus Mathijssen, Vassili Demergis | 2019-12-24 |
| 10474045 | Lithographic apparatus and device manufacturing method | Franciscus Godefridus Casper Bijnen, Arie Jeffrey Den Boef, Richard Johannes Franciscus Van Haren, Patricius Aloysius Jacobus Tinnemans, Alexander Ypma +6 more | 2019-11-12 |
| 10331040 | Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Patricius Aloysius Jacobus Tinnemans, Ralph Brinkhof, Pieter Jacob Heres, Jorn Kjeld Lucas, Loek Johannes Petrus Verhees +2 more | 2019-06-25 |
| 10139740 | Lithographic apparatus and device manufacturing method | Franciscus Godefridus Casper Bijnen | 2018-11-27 |
| 9665012 | Lithographic apparatus and device manufacturing method | — | 2017-05-30 |
| 8208140 | Alignment system and alignment marks for use therewith | Franciscus Godefridus Casper Bijnen, Patrick Warnaar | 2012-06-26 |
| 8208139 | Alignment system and alignment marks for use therewith | Franciscus Godefridus Casper Bijnen, Patrick Warnaar | 2012-06-26 |