Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405542 | Method of determining a mark measurement sequence, stage apparatus and lithographic apparatus | Istvan Nagy, Özer Duman, Arjan Gijsbertsen, Rudolf Michiel Hermans, Erik W. L. Jansen +3 more | 2025-09-02 |
| 10901326 | Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Edo Maria Hulsebos, Patricius Aloysius Jacobus Tinnemans, Ralph Brinkhof, Jorn Kjeld Lucas, Loek Johannes Petrus Verhees +2 more | 2021-01-26 |
| 10620549 | Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Edo Maria Hulsebos, Patricius Aloysius Jacobus Tinnemans, Ralph Brinkhof, Jorn Kjeld Lucas, Loek Johannes Petrus Verhees +2 more | 2020-04-14 |
| 10331040 | Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Edo Maria Hulsebos, Patricius Aloysius Jacobus Tinnemans, Ralph Brinkhof, Jorn Kjeld Lucas, Loek Johannes Petrus Verhees +2 more | 2019-06-25 |