Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276919 | Method for controlling a semiconductor manufacturing process | Marc Hauptmann, Cornelis Johannes Henricus LAMBREGTS, Amir Bin Ismail, Rizvi Rahman, Allwyn Boustheen +4 more | 2025-04-15 |
| 12189314 | Metrology method and associated metrology and lithographic apparatuses | Sebastianus Adrianus GOORDEN, Simon Gijsbert Josephus Mathijssen, Leendert Jan KARSSEMEIJER, Manouk RIJPSTRA, Kaustuve Bhattacharyya | 2025-01-07 |
| 12032299 | Metrology method and associated metrology and lithographic apparatuses | Patricius Aloysius Jacobus Tinnemans, Igor Matheus Petronella Aarts, Kaustuve Bhattacharyya, Leendert Jan KARSSEMEIJER, Stefan Carolus Jacobus Antonius Keij +4 more | 2024-07-09 |
| 11442372 | Method of measuring an alignment mark or an alignment mark assembly, alignment system, and lithographic tool | Franciscus Godefridus Casper Bijnen | 2022-09-13 |
| 11029610 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Ahmet Koray Erdamar, Loek Johannes Petrus Verhees +11 more | 2021-06-08 |
| 10962887 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Boris Menchtchikov +13 more | 2021-03-30 |
| 10901326 | Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Edo Maria Hulsebos, Patricius Aloysius Jacobus Tinnemans, Pieter Jacob Heres, Jorn Kjeld Lucas, Loek Johannes Petrus Verhees +2 more | 2021-01-26 |
| 10620549 | Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Edo Maria Hulsebos, Patricius Aloysius Jacobus Tinnemans, Pieter Jacob Heres, Jorn Kjeld Lucas, Loek Johannes Petrus Verhees +2 more | 2020-04-14 |
| 10527958 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Boris Menchtchikov +13 more | 2020-01-07 |
| 10416577 | Position measuring method of an alignment target | Simon Gijsbert Josephus Mathijssen, Maikel Robert GOOSEN, Vassili Demergis, Bartolomeus Petrus Rijpers | 2019-09-17 |
| 10331040 | Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Edo Maria Hulsebos, Patricius Aloysius Jacobus Tinnemans, Pieter Jacob Heres, Jorn Kjeld Lucas, Loek Johannes Petrus Verhees +2 more | 2019-06-25 |
| 8842293 | Level sensor arrangement for lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef, Jozef Petrus Henricus Benschop, Lukasz Jerzy Macht | 2014-09-23 |
| 8675210 | Level sensor, lithographic apparatus, and substrate surface positioning method | Arie Jeffrey Den Boef, Jozef Petrus Henricus Benschop, Willem Jurrianus Venema, Lukasz Jerzy Macht, Laurent Khuat Duy +1 more | 2014-03-18 |
| 8208118 | Method for determining exposure settings, lithographic exposure apparatus, computer program and data carrier | David Warren Burry, Frank Staals, Robert Franken, Erik Johan Koop | 2012-06-26 |
| 7889357 | Method for positioning a target portion of a substrate with respect to a focal plane of a projection system | Cornelis Henricus Van De Vin, Arthur Winfried Eduardus Minnaert, Alex Van Zon | 2011-02-15 |
| 7746484 | Method for positioning a target portion of a substrate with respect to a focal plane of a projection system | Cornelis Henricus Van De Vin, Arthur Winfried Eduardus Minnaert, Alex Van Zon | 2010-06-29 |
| 7649635 | Method for determining a map, device manufacturing method, and lithographic apparatus | Hielke Schoonewelle, Marcus Boonman, Martin Jules Marie-Emile De Nivelle, Jan Stoeten, Erwin Antonius Martinus Van Alphen | 2010-01-19 |
| 7292351 | Method for determining a map, device manufacturing method, and lithographic apparatus | Hielke Schoonewelle, Marcus Boonman, Martin Jules Marie-Emile De Nivelle, Jan Stoeten, Erwin Antonius Martinus Van Alphen | 2007-11-06 |
| 7239368 | Using unflatness information of the substrate table or mask table for decreasing overlay | Rene Oesterholt, Tjarko Adriaan Rudolf Van Empel, Leon Martin Levasier, Joost Jeroen Ottens, Koen Jacobus Johannes Maria Zaal +1 more | 2007-07-03 |
| 7113257 | Assembly comprising a sensor for determining at least one of tilt and height of a substrate, a method therefor and a lithographic projection apparatus | Marcus Boonman, Martin Jules Marie-Emile De Nivelle | 2006-09-26 |