Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11106144 | Lithographic method and apparatus | Paulus Hubertus Petrus Koller, Johannes Jacobus Matheus Baselmans | 2021-08-31 |
| 10416577 | Position measuring method of an alignment target | Ralph Brinkhof, Simon Gijsbert Josephus Mathijssen, Maikel Robert GOOSEN, Vassili Demergis | 2019-09-17 |
| 9116086 | Deposition method and apparatus | Jurriaan Hendrik Koenraad Van Schaik | 2015-08-25 |
| 8722179 | Substrate comprising a mark | Richard Johannes Franciscus Van Haren, Harminder Singh, Gerald Arthur Finken | 2014-05-13 |
| 8609441 | Substrate comprising a mark | Richard Johannes Franciscus Van Haren, Harminder Singh, Gerald Arthur Finken | 2013-12-17 |
| 7629697 | Marker structure and method for controlling alignment of layers of a multi-layered substrate | Richard Johannes Franciscus Van Haren, Arie Jeffrey Den Boef, Jacobus Burghoorn, Maurits Van Der Schaar | 2009-12-08 |