| 12230469 |
Apparatus for and method of local control of a charged particle beam |
Albertus Victor Gerardus MANGNUS |
2025-02-18 |
| 12183540 |
Systems and methods of determining aberrations in images obtained by a charged-particle beam tool |
Yifeng Shao |
2024-12-31 |
| 12165836 |
Systems and methods of profiling charged-particle beams |
Erwin Paul SMAKMAN |
2024-12-10 |
| 11961700 |
Systems and methods for image enhancement for a multi-beam charged-particle inspection system |
Albertus Victor Gerardus MANGNUS, Lucas KUINDERSMA |
2024-04-16 |
| 11942302 |
Pulsed charged-particle beam system |
Arno Jan Bleeker, Pieter Willem Herman De Jager, Erwin Paul SMAKMAN, Albertus Victor Gerardus MANGNUS, Yan Ren +1 more |
2024-03-26 |
| 11881374 |
Apparatus for and method of controlling an energy spread of a charged-particle beam |
Shakeeb Bin HASAN, Yan Ren, Albertus Victor Gerardus MANGNUS, Erwin Paul SMAKMAN |
2024-01-23 |
| 11791132 |
Aperture array with integrated current measurement |
Albertus Victor Gerardus MANGNUS, Erwin Paul SMAKMAN |
2023-10-17 |
| 11029610 |
Lithographic method |
Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Ahmet Koray Erdamar, Loek Johannes Petrus Verhees +11 more |
2021-06-08 |
| 10962887 |
Lithographic method |
Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Boris Menchtchikov +13 more |
2021-03-30 |
| 10942460 |
Mark position determination method |
Simon Gijsbert Josephus Mathijssen |
2021-03-09 |
| 10527958 |
Lithographic method |
Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Boris Menchtchikov +13 more |
2020-01-07 |
| 10474039 |
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method |
Paul Christiaan Hinnen, Simon Gijsbert Josephus Mathijssen, Maurits Van Der Schaar, Arie Jeffrey Den Boef |
2019-11-12 |
| 10416577 |
Position measuring method of an alignment target |
Ralph Brinkhof, Simon Gijsbert Josephus Mathijssen, Vassili Demergis, Bartolomeus Petrus Rijpers |
2019-09-17 |