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Method for determining a map, device manufacturing method, and lithographic apparatus |
Hielke Schoonewelle, Ralph Brinkhof, Martin Jules Marie-Emile De Nivelle, Jan Stoeten, Erwin Antonius Martinus Van Alphen |
2010-01-19 |
| 7564536 |
Lithographic apparatus and device manufacturing method |
Joost Jeroen Ottens, Thomas Josephus Maria Castenmiller, Andre Bernardus Jeunink |
2009-07-21 |
| 7292351 |
Method for determining a map, device manufacturing method, and lithographic apparatus |
Hielke Schoonewelle, Ralph Brinkhof, Martin Jules Marie-Emile De Nivelle, Jan Stoeten, Erwin Antonius Martinus Van Alphen |
2007-11-06 |
| 7202938 |
Off-axis levelling in lithographic projection apparatus |
Theodorus Marinus Modderman, Gerrit Johannes Nijmeijer, Nicholaas A. A. J. van Asten, Frederik T. E. Heuts, Richard J. H. Du Croo de Jongh +1 more |
2007-04-10 |
| 7113256 |
Lithographic apparatus and device manufacturing method with feed-forward focus control |
Hans Butler, Petrus Marinus Christianus Maria Van Den Biggelaar |
2006-09-26 |
| 7113257 |
Assembly comprising a sensor for determining at least one of tilt and height of a substrate, a method therefor and a lithographic projection apparatus |
Ralph Brinkhof, Martin Jules Marie-Emile De Nivelle |
2006-09-26 |
| 7019815 |
Off-axis leveling in lithographic projection apparatus |
Johannes Christiaan Maria Jasper, Erik Roelof Loopstra, Theodorus Marinus Modderman, Gerrit Johannes Nijmeijer, Nicolaas Antonius Allegondus Johannes Van Asten +5 more |
2006-03-28 |
| 6924884 |
Off-axis leveling in lithographic projection apparatus |
Petrus Johannes Maria Broodbakker, Gerrit Johannes Nijmeijer, Mingcheng Zong, Jozef Cornelus Antonius Roijers |
2005-08-02 |
| 6741331 |
Lithographic apparatus with improved exposure area focus, device manufacturing method, and device manufactured thereby |
Johannes Catharinus Hubertus Mulkens, Hans Butler |
2004-05-25 |
| 6674510 |
Off-axis levelling in lithographic projection apparatus |
Johannes Christiaan Maria Jasper, Erik Roelof Loopstra, Theodorus Marinus Modderman, Gerrit Johannes Nijmeijer, Nicolaas Antonius Allegondus Johannes Van Asten +5 more |
2004-01-06 |