Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553393 | Laser-assisted electron-beam inspection for semiconductor devices | Shiguang Li, Jie Guo | 2020-02-04 |
| 6924884 | Off-axis leveling in lithographic projection apparatus | Marcus Boonman, Petrus Johannes Maria Broodbakker, Gerrit Johannes Nijmeijer, Jozef Cornelus Antonius Roijers | 2005-08-02 |