Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7646471 | Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby | Paulus Antonius Andreas Teunissen, Rene Marinus Gerardus Johan Queens | 2010-01-12 |
| 7248337 | Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby | Paulus Antonius Andreas Teunissen, Rene Marinus Gerardus Johan Queens | 2007-07-24 |
| 6924884 | Off-axis leveling in lithographic projection apparatus | Marcus Boonman, Gerrit Johannes Nijmeijer, Mingcheng Zong, Jozef Cornelus Antonius Roijers | 2005-08-02 |