Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7202938 | Off-axis levelling in lithographic projection apparatus | Theodorus Marinus Modderman, Gerrit Johannes Nijmeijer, Frederik T. E. Heuts, Richard J. H. Du Croo de Jongh, Marcus Boonman +1 more | 2007-04-10 |