Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7361911 | Lithographic apparatus and device manufacturing method | Johannes Hubertus Josephina Moors, Robertus Nicodemus Jacobus Van Ballegoij, Vadim Yevgenyevich Banine, Gert-Jan Heerens, Johannes Henricus Wilhelmus Jacobs +2 more | 2008-04-22 |
| 7202938 | Off-axis levelling in lithographic projection apparatus | Theodorus Marinus Modderman, Gerrit Johannes Nijmeijer, Nicholaas A. A. J. van Asten, Richard J. H. Du Croo de Jongh, Marcus Boonman +1 more | 2007-04-10 |
| 7019815 | Off-axis leveling in lithographic projection apparatus | Johannes Christiaan Maria Jasper, Erik Roelof Loopstra, Theodorus Marinus Modderman, Gerrit Johannes Nijmeijer, Nicolaas Antonius Allegondus Johannes Van Asten +5 more | 2006-03-28 |
| 6674510 | Off-axis levelling in lithographic projection apparatus | Johannes Christiaan Maria Jasper, Erik Roelof Loopstra, Theodorus Marinus Modderman, Gerrit Johannes Nijmeijer, Nicolaas Antonius Allegondus Johannes Van Asten +5 more | 2004-01-06 |