| 10588211 |
Radiation source having debris control |
Rolf Theodorus Nicolaas Beijsens, Kornelis Frits Feenstra, Arjen Teake De Jong, Reinier Theodorus Martinus Jilisen, Niek Antonius Jacobus Maria Kleemans +3 more |
2020-03-10 |
| 7835017 |
Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured thereby |
Theodorus Marinus Modderman, Johan Maria Van Boxmeer, Gerrit Johannes Nijmeijer |
2010-11-16 |
| 7751059 |
Method for correcting disturbances in a level sensor light path |
Oana Cristina Balan, Luberthus Ouwehand, Machiel Jacobus Johannes Viguurs, Alexander Charles Franciscus Anna Van Well, Lun Kai Cheng +3 more |
2010-07-06 |
| 7542127 |
Lithographic apparatus and method for manufacturing a device |
Timotheus Franciscus Sengers, Wilhelmus Josephus Box, Tjarko Adriaan Rudolf Van Empel, Leon Martin Levasier, Erik Roelof Loopstra +6 more |
2009-06-02 |
| 7411667 |
Method for correcting disturbances in a level sensor light path |
Oana Cristina Balan, Luberthus Ouwehand, Machiel Jacobus Johannes Viguurs, Alexander Charles Franciscus Anna Van Well, Lun Kai Cheng +3 more |
2008-08-12 |
| 7019815 |
Off-axis leveling in lithographic projection apparatus |
Johannes Christiaan Maria Jasper, Erik Roelof Loopstra, Theodorus Marinus Modderman, Gerrit Johannes Nijmeijer, Frederik T. E. Heuts +5 more |
2006-03-28 |
| 6674510 |
Off-axis levelling in lithographic projection apparatus |
Johannes Christiaan Maria Jasper, Erik Roelof Loopstra, Theodorus Marinus Modderman, Gerrit Johannes Nijmeijer, Frederik T. E. Heuts +5 more |
2004-01-06 |
| 6327488 |
Device for localizing an object in a turbid medium |
Martinus B. Van Der Mark, Wilhelmus M. Walraven |
2001-12-04 |
