Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10571363 | Method of determining an optimal focus height for a metrology apparatus | Mariya Vyacheslavivna Medvedyeva, Anagnostis Tsiatmas, Hugo Augustinus Joseph Cramer, Martinus Hubertus Maria Van Weert, Bastiaan Onne Fagginger Auer +2 more | 2020-02-25 |
| 10488765 | Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus | Marinus Johannes Maria Van Dam, Koos Van Berkel, Sietse Thijmen Van Der Post, Johannes Hubertus Antonius Van De Rijdt | 2019-11-26 |
| 8994921 | Scatterometer and lithographic apparatus | Nicolass Antonius Allegondus Johannes Van Asten, Arnold Sinke, Marnix Aldert Tas, Johannes Cornelis Maria Timmermans, Jascha Van Pommeren | 2015-03-31 |
| 7869022 | Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring system | Henricus Petrus Maria Pellemans, Robert Franken | 2011-01-11 |
| 7835017 | Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured thereby | Theodorus Marinus Modderman, Nicolaas Antonius Allegondus Johannes Van Asten, Gerrit Johannes Nijmeijer | 2010-11-16 |