Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8994921 | Scatterometer and lithographic apparatus | Johan Maria Van Boxmeer, Nicolass Antonius Allegondus Johannes Van Asten, Marnix Aldert Tas, Johannes Cornelis Maria Timmermans, Jascha Van Pommeren | 2015-03-31 |
| 7473915 | System and method to pattern an object through control of a radiation source | — | 2009-01-06 |
| 7298455 | Lithographic apparatus and device manufacturing method | Jan-Peter Hauschild | 2007-11-20 |
| 7109498 | Radiation source, lithographic apparatus, and device manufacturing method | — | 2006-09-19 |
| 6166485 | Electron gun with heat dissipation elements | Ron Kroon, Maarten H. Zonneveld, Edwin Heijman | 2000-12-26 |